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  1. RCA clean - Wikipedia

    The RCA clean is a standard set of wafer cleaning steps which need to be performed before high-temperature processing steps (oxidation, diffusion, CVD) of silicon wafers in semiconductor …

  2. High performance cleaning chemistries for CMP pad cleaning as well as silicon carbide (SiC) wafer cleaning for-mance in advanced processes while protecting the underlying thin films and materials. …

  3. Ultra Silicon Carbide (SiC) Wafer Cleaning Tool | ACM Research

    While silicon carbide (SiC) wafers are harder than silicon, they are more fragile and require special handling. Our Ultra C SiC Substrate Cleaning Tool was designed specifically to support these …

  4. Amazon.com: Sc1 Cleaner

    1-48 of over 2,000 results for "sc1 cleaner" Results Check each product page for other buying options. Price and other details may vary based on product size and color.

  5. SiC Wafer Cleaning System – HRT TECHNOLOGY CO., LTD.

    The SiC wafer cleaning machine has many advantages, such as a small footprint and high cost-effectiveness. It can use an ozone (O3) generator to produce ozone water, which can effectively …

  6. Silicon Wafer Surface Cleaning: RCA, Piranha, HF & Beyond

    How Do You Clean The Surface of Silicon Wafers? Cleaning the surface of silicon wafers is a critical step in semiconductor manufacturing to remove organic, inorganic, and particulate contaminants.

  7. Wafer Cleaning Process - Modutek

    The cleaning solution comprises five parts: water, 1 part 30% hydrogen peroxide, and 1 part 27% ammonium hydroxide. It is an effective way to remove organic contaminants and leaves a thin layer …

  8. Wafer cleaning process - RCA cleaning and contact angle

    Mar 4, 2025 · RCA Clean is a standard protocol used to remove organic and inorganic contaminants from silicon wafers, ensuring their readiness for subsequent high-temperature processing steps such …

  9. Post-CMP Cleaning Options for SiC and Silicon Substrates

    Aug 31, 2022 · Equipping our post-CMP tool with the doubled-sided brushing and clean step ensures removal of all slurry and SiC residues after wafer polishing. This incarnation of our post-CMP tool is …

  10. Silicon Carbide Substrate Cleaning Solutions | Wide Band Gap ...

    Aug 23, 2022 · Neutralizes oxidizer and reduces particle counts on wafer. Industry-leading cleaning chemistry for SiC, optimized for excellent particle reduction of surface contamination generated from …